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A study of plasma-enhanced CVD growth of Si nanowires catalyzed by indium

Date

2007
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dc.contributor.authorIacopi, Francesca
dc.contributor.authorVereecken, Philippe
dc.contributor.authorSchaekers, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorGriffiths, Hefin
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.accessioned2021-10-16T16:48:31Z
dc.date.available2021-10-16T16:48:31Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12329
dc.source.conferenceEuropean Congress and Exhibition on Advanced Materials and Processes - EUROMAT
dc.source.conferencedate10/09/2007
dc.source.conferencelocationNürnberg Germany
dc.title

A study of plasma-enhanced CVD growth of Si nanowires catalyzed by indium

dc.typeOral presentation
dspace.entity.typePublication
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