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Analysis of Leakage Mechanisms in AlN Nucleation Layers on p-Si and p-SOI Substrates

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1893 since deposited on 2021-10-28
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Acq. date: 2026-09-15

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1893 since deposited on 2021-10-28
1last month
1last week
Acq. date: 2026-09-15

Citations