Publication:

Resist process development for the EUV alpha demo tool at IMEC

Date

2008

Presentation

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Files

17732.pdf 410.27 KB

Author(s)

Goethals, Mieke

;

Niroomand, Ardavan

;

Van Roey, Frieda

;

;

;

Baudemprez, Bart

;

Pollentier, Ivan

;

de Marneffe, Jean-Francois

;

Demuynck, Steven

;

Jonckheere, Rik

;

Metrics

1911 since deposited on 2021-10-17

Acq. date: 2025-12-12