Publication:

Characterization of epitaxial Si:C:P and Si:P layers for source/drain formation in advanced bulk finFETs

Date

2014-10

Meeting abstract

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Author(s)

;

Profijt, Harald

;

Hikavyy, Andriy

;

;

Kubicek, Stefan

;

Mannaert, Geert

;

L'abbe, Caroline

;

;

Horiguchi, Naoto

;

Clarysse, Trudo

;

Parmentier, Brigitte

;

Dhayalan, Sathish Kumar

;

;

Maes, Jan Willem

;

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Acq. date: 2026-04-27