Publication:

Characterization of CVD-Mn barrier layers using X-ray absorption fine structure

Date

2011
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorAblett, James
dc.contributor.authorWilson, Chris
dc.contributor.authorPhuong, Nguyen Mai
dc.contributor.authorKoike, Junichi
dc.contributor.authorTokei, Zsolt
dc.contributor.authorSterbinsky, George
dc.contributor.authorWoicik, Joseph
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.date.accessioned2021-10-19T12:28:17Z
dc.date.available2021-10-19T12:28:17Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18442
dc.source.conferenceAdvanced Metallization Conference - ADMETA
dc.source.conferencedate13/09/2011
dc.source.conferencelocationTokyo Japan
dc.title

Characterization of CVD-Mn barrier layers using X-ray absorption fine structure

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations