Publication:

Thermal oxidation of a densely packed array of vertical Si nanowires

Date

2010
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorKurstjens, Rufi
dc.contributor.authorDross, Frederic
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.contributor.imecauthorKurstjens, Rufi
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.accessioned2021-10-18T17:52:22Z
dc.date.available2021-10-18T17:52:22Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17413
dc.source.conferenceSPIE Optics and Photonics Conference
dc.source.conferencedate1/08/2010
dc.source.conferencelocationSan Diego, CA USA
dc.title

Thermal oxidation of a densely packed array of vertical Si nanowires

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations