Publication:

Instability and defects in gate dielectric: similarity and differences between Hf-stacks and SiO2

Date

2007

Proceedings Paper

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Files

14520.pdf 554.28 KB

Author(s)

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Groeseneken, Guido

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Pantisano, Luigi

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De Gendt, Stefan

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Statistics

1881 since deposited on 2021-10-16

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Acq. date: 2026-10-11