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SIMS analysis of oxynitrides: evidence for nitrogen diffusion induced by oxygen flooding

Date

2000
Journal article
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dc.contributor.authorDe Witte, Hilde
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGijbels, Renaat
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-14T12:50:33Z
dc.date.available2021-10-14T12:50:33Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4287
dc.source.beginpage761
dc.source.endpage765
dc.source.issue11
dc.source.journalSurface and Interface Analysis
dc.source.volume29
dc.title

SIMS analysis of oxynitrides: evidence for nitrogen diffusion induced by oxygen flooding

dc.typeJournal article
dspace.entity.typePublication
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