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Impact of galvanic corrosion on metal gate stacks
Publication:
Impact of galvanic corrosion on metal gate stacks
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Date
2008
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17495.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wada, Masayuki
;
Garaud, Sylvain
;
Ferain, Isabelle
;
Collaert, Nadine
;
Sano, Ken-Ichi
;
Snow, Jim
;
Vos, Rita
;
Leunissen, Peter
;
Mertens, Paul
;
Eitoku, A
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2016
since deposited on 2021-10-17
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Acq. date: 2026-01-11
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Metrics
Views
2016
since deposited on 2021-10-17
3
last month
Acq. date: 2026-01-11
Citations