Publication:
Impact of dielectric charging on the actuation of electrostatic MEM devices
Date
| dc.contributor.author | Rottenberg, Xavier | |
| dc.contributor.imecauthor | Rottenberg, Xavier | |
| dc.date.accessioned | 2021-10-16T04:39:47Z | |
| dc.date.available | 2021-10-16T04:39:47Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11132 | |
| dc.source.conference | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS | |
| dc.source.conferencedate | 30/05/2005 | |
| dc.source.conferencelocation | Montreux Switzerland | |
| dc.title | Impact of dielectric charging on the actuation of electrostatic MEM devices | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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