Publication:

A single metrology tool solution for complete exposure tool setup

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorLaidler, David
dc.contributor.authorD'have, Koen
dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorLeray, Philippe
dc.contributor.authorCheng, Shaunee
dc.contributor.authorDusa, Mircea
dc.contributor.authorVanoppen, Peter
dc.contributor.authorHinnen, Paul
dc.contributor.imecauthorLaidler, David
dc.contributor.imecauthorD'have, Koen
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorDusa, Mircea
dc.contributor.orcidimecLaidler, David::0000-0003-4055-3366
dc.contributor.orcidimecD'have, Koen::0000-0002-5195-9241
dc.date.accessioned2021-10-18T17:55:37Z
dc.date.available2021-10-18T17:55:37Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17423
dc.source.beginpage763809
dc.source.conferenceMetrology, Inspection and Process Control for Microlithography XXIV
dc.source.conferencedate21/02/2010
dc.source.conferencelocationSan Jose, CA USA
dc.title

A single metrology tool solution for complete exposure tool setup

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
19019.pdf
Size:
886.41 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions