Publication:
Fabrication of 2D and 3D Photonic Structures using Focused Ion Beam
Date
| dc.contributor.author | Sloyan, Karen | |
| dc.contributor.author | Melkonyan, Henrik | |
| dc.contributor.author | Dahlem, Marcus | |
| dc.contributor.imecauthor | Dahlem, Marcus S. | |
| dc.contributor.imecauthor | Dahlem, Marcus | |
| dc.contributor.orcidimec | Dahlem, Marcus::0000-0002-1373-6709 | |
| dc.date.accessioned | 2021-11-22T09:45:26Z | |
| dc.date.available | 2021-11-02T16:05:48Z | |
| dc.date.available | 2021-11-22T09:45:26Z | |
| dc.date.issued | 2020 | |
| dc.identifier.eisbn | 978-1-7281-5891-4 | |
| dc.identifier.issn | 2374-0140 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38232 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE Photonics Conference (IPC) | |
| dc.source.conferencedate | SEP 28-OCT 01, 2020 | |
| dc.source.conferencelocation | Vancouver, BC, Canada | |
| dc.source.journal | na | |
| dc.source.numberofpages | 2 | |
| dc.subject.keywords | TEMPERATURE | |
| dc.title | Fabrication of 2D and 3D Photonic Structures using Focused Ion Beam | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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