Publication:
Investigation of stress in STI using UV-Raman spectroscopy
Date
| dc.contributor.author | Dombrowski, Kai | |
| dc.contributor.author | Dietrich, B. | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Rooyackers, Rita | |
| dc.contributor.author | Badenes, Gonçal | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.date.accessioned | 2021-10-06T11:05:37Z | |
| dc.date.available | 2021-10-06T11:05:37Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3426 | |
| dc.source.beginpage | 196 | |
| dc.source.conference | ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference; 13-15 September 1999; Leuven, Belgium. | |
| dc.source.endpage | 199 | |
| dc.title | Investigation of stress in STI using UV-Raman spectroscopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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