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Charge pumping spectroscopy: HfSiON defect study after substrate hot electron injection
Publication:
Charge pumping spectroscopy: HfSiON defect study after substrate hot electron injection
Date
2007
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Toledano-Luque, M.
;
Pantisano, Luigi
;
Degraeve, Robin
;
Zahid, Mohammed
;
Ferain, Isabelle
;
San Andres Serrano, Enrique
;
Groeseneken, Guido
;
De Gendt, Stefan
Journal
Microelectronic Engineering
Abstract
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1890
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1890
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations