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Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applications
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165 since deposited on 2023-09-15
23last month
4last week
Acq. date: 2026-08-05
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140 since deposited on 2023-09-15
Acq. date: 2026-08-05
Citations