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Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applications
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Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applications
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Date
2023-09-25
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ghorbani, Leila
;
Kundu, Shreya
;
Lazzarino, Frederic
;
De Gendt, Stefan
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N/A
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Downloads
142
since deposited on 2023-09-15
9
last month
Acq. date: 2026-06-06
Views
140
since deposited on 2023-09-15
5
last month
Acq. date: 2026-06-06
Citations