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Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applications
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Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applications
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Date
2023
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ghorbani, Leila
;
Kundu, Shreya
;
Lazzarino, Frederic
;
De Gendt, Stefan
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N/A
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since deposited on 2023-09-15
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Downloads
182
since deposited on 2023-09-15
11
last month
2
last week
Acq. date: 2026-09-18
Views
143
since deposited on 2023-09-15
2
last month
Acq. date: 2026-09-18
Citations