Publication:
SEG Si: facet control and selectivity vs. nitride and oxide pattern
Date
| dc.contributor.author | Howard, Dave | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.date.accessioned | 2021-09-30T08:27:15Z | |
| dc.date.available | 2021-09-30T08:27:15Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1937 | |
| dc.source.conference | Materials Research Society 1997 Spring Meeting : Symposium on Epitaxial Growth - Principles and Applications; March 31 - April 2 | |
| dc.source.conferencelocation | ||
| dc.title | SEG Si: facet control and selectivity vs. nitride and oxide pattern | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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