Capacitive field-effect (bio-)chemical sensors based on nanocrystalline diamond films

dc.contributor.author	Bäcker, M.
dc.contributor.author	Poghossian, A.
dc.contributor.author	Abouzar, M.H.
dc.contributor.author	Wenmackers, S.
dc.contributor.author	Janssens, S.D.
dc.contributor.author	Haenen, Ken
dc.contributor.author	Wagner, Patrick
dc.contributor.author	Schöning, M.J.
dc.contributor.imecauthor	Haenen, Ken
dc.contributor.orcidimec	Haenen, Ken::0000-0001-6711-7367
dc.date.accessioned	2021-10-18T15:17:04Z
dc.date.available	2021-10-18T15:17:04Z
dc.date.issued	2010
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/16687
dc.source.beginpage	173
dc.source.conference	Diamond Electronics and Bioelectronics - Fundamentals to Applications III
dc.source.conferencedate	30/11/2009
dc.source.conferencelocation	Boston, MA USA
dc.source.endpage	178
dc.title	Capacitive field-effect (bio-)chemical sensors based on nanocrystalline diamond films
dc.type	Proceedings paper
dspace.entity.type	Publication
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