Publication:
Analysis of hydroxyl group controlled atomic layer deposition of hafnium dioxide from hafnium tetrachloride and water
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1894 since deposited on 2021-10-15
1last month
Acq. date: 2026-03-17
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Statistics
Views
1894 since deposited on 2021-10-15
1last month
Acq. date: 2026-03-17
Citations