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Investigating the effects of subtrate temperature and holder position on the structural and optical behavior of sputtered hexagonal boron nitride films

Date

2014
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dc.contributor.authorHoang, Duc Q.
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorJanssens, Stoffel
dc.contributor.authorD'Haen, Jan
dc.contributor.authorHaenen, Ken
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-22T01:59:31Z
dc.date.available2021-10-22T01:59:31Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23940
dc.source.conference13th International Conference on Reactive Sputter Deposition
dc.source.conferencedate11/12/2014
dc.source.conferencelocationGent Belgium
dc.title

Investigating the effects of subtrate temperature and holder position on the structural and optical behavior of sputtered hexagonal boron nitride films

dc.typeOral presentation
dspace.entity.typePublication
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