Publication:
Modeling the substrate effects on nanoindentation mechanical property measurement
Date
| dc.contributor.author | Gonzalez, Mario | |
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | Urbanowicz, Adam | |
| dc.contributor.imecauthor | Gonzalez, Mario | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.date.accessioned | 2021-10-17T22:27:30Z | |
| dc.date.available | 2021-10-17T22:27:30Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15370 | |
| dc.source.beginpage | 486 | |
| dc.source.conference | 10th Int. Conf. Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics - EuroSimE | |
| dc.source.conferencedate | 27/04/2009 | |
| dc.source.conferencelocation | Delft The Netherlands | |
| dc.source.endpage | 490 | |
| dc.title | Modeling the substrate effects on nanoindentation mechanical property measurement | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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