Publication:

Comparing the performance of direct and parametric drives for piezoelectric MEMS actuators

Date

2025-JUN 16
Journal article
https://doi.org/10.1063/5.0276761
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dc.contributor.authorHouri, Samer
dc.contributor.authorRochus, Veronique
dc.contributor.imecauthorHouri, Samer
dc.contributor.imecauthorRochus, Veronique
dc.contributor.orcidimecHouri, Samer::0000-0002-2733-1366
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.date.accessioned2025-06-29T04:00:05Z
dc.date.available2025-06-29T04:00:05Z
dc.date.issued2025-JUN 16
dc.identifier.doi10.1063/5.0276761
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45861
dc.publisherAIP Publishing
dc.source.issue24
dc.source.journalAPPLIED PHYSICS LETTERS
dc.source.numberofpages6
dc.source.volume126
dc.subject.keywordsAMPLIFICATION
dc.title

Comparing the performance of direct and parametric drives for piezoelectric MEMS actuators

dc.typeJournal article
dspace.entity.typePublication
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