Publication:

2D micro-chamber for DC plasma working at low power

Date

2014
Proceedings Paper
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dc.contributor.authorRochus, Veronique
dc.contributor.authorSamara, Vladimir
dc.contributor.authorVereecke, Bart
dc.contributor.authorSoussan, Philippe
dc.contributor.authorOnsia, Bart
dc.contributor.authorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorOnsia, Bart
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.date.accessioned2021-10-22T05:09:40Z
dc.date.available2021-10-22T05:09:40Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24440
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6813810&contentType=Conference+Publications
dc.source.conference15th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE
dc.source.conferencedate7/04/2014
dc.source.conferencelocationGent Belgium
dc.title

2D micro-chamber for DC plasma working at low power

dc.typeProceedings paper
dspace.entity.typePublication
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