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Porosity and critical properties of silica-based low-dielectric-constant materials

Date

2005-05
Proceedings Paper
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dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorTravaly, Youssef
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorShamiryan, Denis
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.date.accessioned2021-10-16T00:43:44Z
dc.date.available2021-10-16T00:43:44Z
dc.date.issued2005-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10052
dc.source.beginpage179
dc.source.conferenceSilicon Nitride and Silicon Dioxide Thin Insulating Films and Other Emerging Dielectrics VIII
dc.source.conferencedate15/05/2005
dc.source.conferencelocationQuebec Canada
dc.source.endpage198
dc.title

Porosity and critical properties of silica-based low-dielectric-constant materials

dc.typeProceedings paper
dspace.entity.typePublication
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