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Impact of Backside Power Delivery Network with Buried Power Rails on Latch-up Immunity in DTCO/STCO

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dc.contributor.authorSerbulova, Kateryna
dc.contributor.authorChen, Shih-Hung
dc.contributor.authorHellings, Geert
dc.contributor.authorVeloso, Anabela
dc.contributor.authorJourdain, Anne
dc.contributor.authorDe Boeck, Jo
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorHoriguchi, Naoto
dc.contributor.imecauthorSerbulova, Kateryna
dc.contributor.imecauthorChen, Shih-Hung
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorDe Boeck, Jo
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecSerbulova, Kateryna::0000-0001-7326-9949
dc.contributor.orcidimecChen, Shih-Hung::0000-0002-6481-2951
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecJourdain, Anne::0000-0002-7610-0513
dc.contributor.orcidimecDe Boeck, Jo::0000-0001-8244-1552
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2024-05-23T10:30:46Z
dc.date.available2023-11-30T16:47:45Z
dc.date.available2024-05-23T10:30:46Z
dc.date.issued2023
dc.identifier.eisbn978-1-58537-347-5
dc.identifier.issn0739-5159
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43202
dc.publisherIEEE
dc.source.conference45th Annual Electrical Overstress/Electrostatic Discharge (EOS/ESD) Symposium
dc.source.conferencedateOCT 02-04, 2023
dc.source.conferencelocationRiverside
dc.source.journalN/A
dc.source.numberofpages6
dc.title

Impact of Backside Power Delivery Network with Buried Power Rails on Latch-up Immunity in DTCO/STCO

dc.typeProceedings paper
dspace.entity.typePublication
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