Publication:

Ultrathin EOT scaling of high-k/metal gate stacks

Date

2011
Proceedings Paper
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Author(s)

Ragnarsson, Lars-Ake  
;
Cho, Moon Ju
;
Chiarella, Thomas  
;
Mitard, Jerome  
;
Schram, Tom  
;
Rohr, Erika
;
Witters, Liesbeth  
;
Togo, Mitsuhiro
;
Horiguchi, Naoto  
;
Thean, Aaron  

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1873 since deposited on 2021-10-19
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Acq. date: 2025-12-15

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