Publication:

Stochastic effects in EUV lithography: random, local CD-variability and printing failures

Date

2017
Journal article
https://doi.org/10.1117/1.JMM.16.4.041013
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Author(s)

De Bisschop, Peter  

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Abstract

Description

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1893 since deposited on 2021-10-24
Acq. date: 2026-01-07

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1893 since deposited on 2021-10-24
Acq. date: 2026-01-07

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