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Measurement and simulation of boron diffusion in strained Si1- xGex epitaxial layers with a linearly graded germanium profile
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1978 since deposited on 2021-10-14
2last month
Acq. date: 2025-12-17
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Metrics
Views
1978 since deposited on 2021-10-14
2last month
Acq. date: 2025-12-17
Citations