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Reactive ion etching of Pt and Pt-Metal stacks, for mems applications using the DSE systems at Imec
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1909 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-15
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1909 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-15
Citations