Publication:

Electrostatic fringing-field actuator (EFFA): application towards a low-complexity RF-MEMS technology

Date

2007-01
Proceedings Paper
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dc.contributor.authorRottenberg, Xavier
dc.contributor.authorNolmans, Philip
dc.contributor.authorEkkels, Phillip
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorMertens, Robert
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorNolmans, Philip
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-16T19:14:14Z
dc.date.available2021-10-16T19:14:14Z
dc.date.issued2007-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12814
dc.source.beginpage203
dc.source.conferenceTechnical Digest 20th IEEE International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate21/01/2007
dc.source.conferencelocationKobe Japan
dc.source.endpage206
dc.title

Electrostatic fringing-field actuator (EFFA): application towards a low-complexity RF-MEMS technology

dc.typeProceedings paper
dspace.entity.typePublication
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