Publication:
Low damage etch approach of a new porous SiOC(H) Low-k dielectric
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1997 since deposited on 2021-10-16
2last month
Acq. date: 2026-09-12
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Statistics
Views
1997 since deposited on 2021-10-16
2last month
Acq. date: 2026-09-12
Citations