Publication:
Mass discrimination in elastic recoil detection analysis and its application to Al2O3 on MoS2
Date
| dc.contributor.author | Laricchiuta, Grazia | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Meersschaut, Johan | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Meersschaut, Johan | |
| dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
| dc.date.accessioned | 2021-10-24T07:28:48Z | |
| dc.date.available | 2021-10-24T07:28:48Z | |
| dc.date.issued | 2017 | |
| dc.identifier.issn | 0168-583X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28757 | |
| dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0168583X16305638 | |
| dc.source.beginpage | 66 | |
| dc.source.endpage | 70 | |
| dc.source.journal | Nuclear Instruments and Methods in Physics Research B | |
| dc.source.volume | 406 | |
| dc.title | Mass discrimination in elastic recoil detection analysis and its application to Al2O3 on MoS2 | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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