Publication:
Nanoscale three-dimensional characterization with scalpel SPM
Date
| dc.contributor.author | Celano, Umberto | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Celano, Umberto | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Celano, Umberto::0000-0002-2856-3847 | |
| dc.date.accessioned | 2021-10-24T03:21:22Z | |
| dc.date.available | 2021-10-24T03:21:22Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27992 | |
| dc.identifier.url | http://onlinelibrary.wiley.com/doi/10.1002/9783527699773.ch8/summary | |
| dc.source.beginpage | 187 | |
| dc.source.book | Conductive Atomic Force Microscope | |
| dc.source.endpage | 210 | |
| dc.title | Nanoscale three-dimensional characterization with scalpel SPM | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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