Publication:
Trap spectroscopy and Ta penetration induced charge trapping in Porous SiOCH low-k dielectrics
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1860 since deposited on 2021-10-21
1last month
Acq. date: 2026-02-25
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1860 since deposited on 2021-10-21
1last month
Acq. date: 2026-02-25
Citations