Publication:
MEMS reliability
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-15T04:25:37Z | |
| dc.date.available | 2021-10-15T04:25:37Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7465 | |
| dc.source.beginpage | 1047 | |
| dc.source.endpage | 1048 | |
| dc.source.issue | 7 | |
| dc.source.journal | Microelectronics Reliability | |
| dc.source.volume | 43 | |
| dc.title | MEMS reliability | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |