Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
A novel approach to characterise a low-k dielectric polymer surface
Publication:
A novel approach to characterise a low-k dielectric polymer surface
Date
2002
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Martin Hoyas, Ana
;
Schuhmacher, Jorg
;
Le, Quoc Toan
;
Whelan, Caroline
;
Schaekers, Marc
;
Celis, Jean-Pierre
;
Maex, Karen
Journal
Abstract
Description
Metrics
Views
1958
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1958
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations