Publication:
Investigation of mechanical stress impact on microelectronic devices using a nano-indentation probing system
Date
| dc.contributor.author | Liu, Yefan | |
| dc.contributor.author | Hiblot, Gaspard | |
| dc.contributor.author | Gonzalez, Mario | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Liu, Yefan | |
| dc.contributor.imecauthor | Hiblot, Gaspard | |
| dc.contributor.imecauthor | Gonzalez, Mario | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | Hiblot, Gaspard::0000-0002-3869-965X | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-25T22:18:22Z | |
| dc.date.available | 2021-10-25T22:18:22Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31211 | |
| dc.identifier.url | https://www.conftool.pro/ecrs10/sessions.php | |
| dc.source.conference | European Conference on Residual Stresses - ECRS10 | |
| dc.source.conferencedate | 11/09/2018 | |
| dc.source.conferencelocation | Leuven Belgium | |
| dc.title | Investigation of mechanical stress impact on microelectronic devices using a nano-indentation probing system | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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