Publication:

Zero-thickness multi work function solutions for N7 bulk FinFETs

Date

2016
Proceedings Paper
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dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorDekkers, Harold
dc.contributor.authorMatagne, Philippe
dc.contributor.authorSchram, Tom
dc.contributor.authorConard, Thierry
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorThean, Aaron
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2021-10-23T13:58:23Z
dc.date.available2021-10-23T13:58:23Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27181
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=7573393
dc.source.beginpage98
dc.source.conferenceIEEE Symposium on VLSI Technology
dc.source.conferencedate14/06/2016
dc.source.conferencelocationHonolulu, HI USA
dc.source.endpage99
dc.title

Zero-thickness multi work function solutions for N7 bulk FinFETs

dc.typeProceedings paper
dspace.entity.typePublication
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