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Chemical mechanical polishing of nickel for damascene applications
Publication:
Chemical mechanical polishing of nickel for damascene applications
Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Teugels, Lieve
;
Van den Eynde, Matthias
;
Delande, Tinne
;
Leunissen, Peter
Journal
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1921
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
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Views
1921
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations