Publication:
Sidewall damage in silica-based low-k material induced by different patterning plasma processes studied by energy filtered and analytical scanning TEM
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1787 since deposited on 2021-10-16
2last month
Acq. date: 2025-12-15
Citations
Metrics
Views
1787 since deposited on 2021-10-16
2last month
Acq. date: 2025-12-15
Citations