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3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions
Publication:
3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions
Date
2011
Presentation
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23184.pdf
99.92 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Schulze, Andreas
;
Eyben, Pierre
;
Zschaetzsch, Gerd
;
Koelling, Sebastian
;
Kumar, Arul
;
Mody, Jay
;
Gilbert, Matthieu
Journal
Abstract
Description
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Views
2009
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
2009
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations