Publication:
Electrical and opical characterization of thin semiconductor layers for advanced ULSI devices
Date
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Gaubas, E. | |
| dc.contributor.author | Rafi, J.M. | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-16T05:03:29Z | |
| dc.date.available | 2021-10-16T05:03:29Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11204 | |
| dc.source.beginpage | 539 | |
| dc.source.conference | Gettering and Defect Engineering in Semiconductor Technology XI. Proceedings of the 11th International Autumn Meeting | |
| dc.source.conferencedate | 25/09/2005 | |
| dc.source.conferencelocation | Giens France | |
| dc.source.endpage | 546 | |
| dc.title | Electrical and opical characterization of thin semiconductor layers for advanced ULSI devices | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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