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Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects

Date

2011
Journal article
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dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorMasahito, Sugiura
dc.contributor.authorKashiwagi, Yusaku
dc.contributor.authorLi, Yunlong
dc.contributor.authorArstila, Kai
dc.contributor.authorRichard, Olivier
dc.contributor.authorCott, Daire
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVereecken, Philippe
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2021-10-19T12:48:34Z
dc.date.available2021-10-19T12:48:34Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn0957-4484
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18686
dc.identifier.urlhttp://iopscience.iop.org/0957-4484/22/8/085302/
dc.source.beginpage85302
dc.source.issue8
dc.source.journalNanotechnology
dc.source.volume22
dc.title

Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects

dc.typeJournal article
dspace.entity.typePublication
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