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Integration of HSQ in the direct-on-metal approach for 0.25-μm technology
Publication:
Integration of HSQ in the direct-on-metal approach for 0.25-μm technology
Date
2000
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gao, Teng
;
Witvrouw, Ann
;
Coenegrachts, Bart
;
Bruynseraede, Christophe
;
Van Hove, Marleen
;
Maex, Karen
Journal
Microelectronic Engineering
Abstract
Description
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Views
1939
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1939
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations