Publication:
MEMS in a Si IC environment
Date
| dc.contributor.author | Baert, Kris | |
| dc.contributor.author | Campitelli, Andrew | |
| dc.contributor.author | Borzi, Raffaella | |
| dc.contributor.imecauthor | Borzi, Raffaella | |
| dc.date.accessioned | 2021-10-14T16:36:27Z | |
| dc.date.available | 2021-10-14T16:36:27Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5028 | |
| dc.source.conference | Commercialisation of Microsystems Conference; 2-6 September 2001; Oxford, UK. | |
| dc.source.conferencelocation | ||
| dc.title | MEMS in a Si IC environment | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |