Publication:

Cost-performance optimisation of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations

Date

2020
Proceedings Paper
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dc.contributor.authorMilojevic, Dragomir
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorBeyne, Eric
dc.contributor.authorDebacker, Peter
dc.contributor.authorWang, Jane
dc.contributor.authorKim, Ryan Ryoung han
dc.contributor.authorVelenis, Dimitrios
dc.contributor.imecauthorMilojevic, Dragomir
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorDebacker, Peter
dc.contributor.imecauthorWang, Jane
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.imecauthorVelenis, Dimitrios
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecDebacker, Peter::0000-0003-3825-5554
dc.date.accessioned2021-10-29T00:49:42Z
dc.date.available2021-10-29T00:49:42Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35585
dc.identifier.urlhttps://doi.org/10.1117/12.2552036
dc.source.beginpage113280R
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability XIV
dc.source.conferencedate23/02/2020
dc.source.conferencelocationSan Jose USA
dc.title

Cost-performance optimisation of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations

dc.typeProceedings paper
dspace.entity.typePublication
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