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Articles
Sub-1nm EOT scaling for high-k metal-gate stacks
Publication:
Sub-1nm EOT scaling for high-k metal-gate stacks
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Heyns, Marc
;
Schram, Tom
;
Ragnarsson, Lars-Ake
;
De Gendt, Stefan
;
Kerber, Andreas
Journal
Solid State Technology
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1832
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations
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Views
1832
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations