Publication:
AlN and PZT thin films: essential ingredients for piezoelectric energy harvesters
Date
| dc.contributor.author | Vullers, Ruud | |
| dc.date.accessioned | 2021-10-19T21:34:49Z | |
| dc.date.available | 2021-10-19T21:34:49Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20122 | |
| dc.source.conference | 2nd International Workshop on Piezoelectric MEMS | |
| dc.source.conferencedate | 6/09/2011 | |
| dc.source.conferencelocation | Lausanne Switzerland | |
| dc.title | AlN and PZT thin films: essential ingredients for piezoelectric energy harvesters | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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