Publication:
Investigation of intragrain defects in pc-Si layers obtained by aluminium-induced crystallization: comparison of layers made by low and high temperature epitaxy
| dc.contributor.author | Van Gestel, Dries | |
| dc.contributor.author | Dogan, Pinar | |
| dc.contributor.author | Gordon, Ivan | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Lee, K.Y. | |
| dc.contributor.author | Beaucarne, Guy | |
| dc.contributor.author | Gall, Stefan | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.imecauthor | Gordon, Ivan | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.orcidimec | Gordon, Ivan::0000-0002-0713-8403 | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-10-18T04:09:42Z | |
| dc.date.available | 2021-10-18T04:09:42Z | |
| dc.date.issued | 2009 | |
| dc.identifier.doi | 10.1016/j.mseb.2009.03.006 | |
| dc.identifier.issn | 0921-5107 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16386 | |
| dc.identifier.url | http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TXF-4VYW1JB-1&_user=799533&_coverDate=03%2F15%2F2009&_alid=927606698& | |
| dc.source.beginpage | 134 | |
| dc.source.endpage | 137 | |
| dc.source.journal | Materials Science and Engineering B | |
| dc.source.volume | 159-160 | |
| dc.title | Investigation of intragrain defects in pc-Si layers obtained by aluminium-induced crystallization: comparison of layers made by low and high temperature epitaxy | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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