Low-power DRAM-compatible replacement gate high-k/metal gate stacks

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Author(s)

Ritzenthaler, Romain

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Spessot, Alessio

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Caillat, Christian

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Srividya, Vidya

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Ragnarsson, Lars-Ake

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Groeseneken, Guido

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Horiguchi, Naoto

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Journal

Solid-State Electronics

Metrics

1947 since deposited on 2021-10-21

Acq. date: 2025-10-23