Publication:

Electro-optic modulation in silicon nitride photonic integrated circuits by means of ALD ZnO overlays

Date

2017
Proceedings Paper
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dc.contributor.authorHermans, Artur
dc.contributor.authorVan Daele, Michiel
dc.contributor.authorDendooven, Joliern
dc.contributor.authorClemmen, Stephane
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorHermans, Artur
dc.contributor.imecauthorClemmen, Stephane
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecHermans, Artur::0000-0003-2911-7125
dc.contributor.orcidimecClemmen, Stephane::0000-0003-0192-4662
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-24T05:37:04Z
dc.date.available2021-10-24T05:37:04Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28488
dc.identifier.urlhttps://www.ecio-conference.org/program/
dc.source.beginpageT5.4
dc.source.conferenceEuropean Conference on Integrated Optics - ECIO
dc.source.conferencedate3/04/2017
dc.source.conferencelocationEindhoven The Netherlands
dc.title

Electro-optic modulation in silicon nitride photonic integrated circuits by means of ALD ZnO overlays

dc.typeProceedings paper
dspace.entity.typePublication
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